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4/5/6寸设备 : WPA200
8/12寸设备 : WPA300
|
Item |
Description |
|
Throughput |
l4” 、 5” 90 wafers per hour
6” 85 wafers per hour (奕臻条件) |
|
Pass line |
Cassette Loading/Unloading port : 900 mm |
|
设备外观尺寸 |
1,100mm(W)x1,000mm(W)x 2,000mm(H) |
|
设备总重 |
700 Kg |
|
Item |
Description |
|
Throughput |
l70 wafers per hour
Tact time about 50 seconds (奕臻条件) |
|
Pass line |
Cassette station: 900mm |
|
设备外观尺寸 |
1,800mm(L)x1,400mm(W)x 2,500mm(H) |
|
设备总重 |
1,000 Kg |