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晶圆贴膜设备


 4/5/6寸设备 :  WTA2000



Item

Description

Model

WTA2000

Throughput

l120 wafers per hour

Tact time about 30 seconds (奕臻条件)

Pass line

Cassette Loading/Unloading port : 900 mm

设备外观尺寸

1,200mm(L)x1,200mm(W)x 2,500mm(H)

设备总重

1,000 Kg