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8/12寸设备 : WTA3000
|
Item |
Description |
|
Throughput |
l70 wafers per hour
Tact time about 50 seconds (奕臻条件) |
|
Pass line |
Cassette station: 900mm |
|
设备外观尺寸 |
1,800mm(L)x1,400mm(W)x 2,250mm(H) |
|
设备总重 |
1,200 Kg |